Could you please help me to configure DFM settings to check short circuit between inner layers?

To locate any short circuits during a DFM Check requires to check the box Compare Net and select a Netlist File [...]

Note:  You can actually perform Netlist comparison separately from DFM Check, by going to menu:  Tools | Nets | Netlist Comparison...

Here's a few related links demonstrating tutorial movies and sample Netlist PDF reports,

• https://support.numericalinnovations.com/support/discussions/topics/14000003461
• https://support.numericalinnovations.com/support/discussions/topics/14000013518

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